ガスセンサー

Gas sensor

• The detection and monitoring of small amunts of gases are extremly important in industry.
• Nanostructure can be achieved to small amount gas detection and low power consumption.
• The power consumption of gas sensor is crucial issue because of useful application for continuous detection and mobile devices
• To obtain a high performance of gas detection, a thin filmed sensing materials and micromachined small device were deveoloped.
• The micro-platform fabricated by MEMS processes for gas sensor including heater and sensing electrodes is achieved very low power consumption.
• Selective detection of CO and CH4
  • - Operating temperature controlling in electrronic interface circuit
  • - Many applications in field of fuel combustion, such as city gas facilities, gas boiler

• Why MEMS device ?
  (Micro-Electro-Mechanical System)
•   It can achieve;
• - High sensitivity and accuracy
• - Low power consumption
• - Small size sensor and module
• - Useful applications for mobile

Structure of MEMS micro-hotplate